ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.

SDO:

ISO

Language:

English

ICS Codes:

81.060.30

Status:

Published

Publish date:

2024-10-31

Standard Number:

ISO 19606:2024