ISO 24477:2022

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
SDO:
ISO
Language:
English
ICS Codes:
23.160
Status:
Published
Publish date:
2022-08-04
Standard Number:
ISO 24477:2022