ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

SDO:

ISO

Language:

English

ICS Codes:

01.040.71; 71.040.40

Status:

Published

Publish date:

2022-06-29

Standard Number:

ISO 18115-3:2022