ISO 23131:2021

Ellipsometry — Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
SDO:
ISO
Language:
English
ICS Codes:
17.020
Status:
Published
Publish date:
2021-04-21
Standard Number:
ISO 23131:2021