IEC 60050-523:2018

International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. This terminology is consistent with the terminology developed in the other specialized parts of the IEV. It has the status of a horizontal standard in accordance with IEC Guide 108.
SDO:
IEC
Language:
English
ICS Codes:
01.040.29; 31.080.99
Status:
Published
Publish date:
2018-12-05
Standard Number:
IEC 60050-523:2018