IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

SDO:

IEC

Language:

English

ICS Codes:

31.080.99

Status:

Published

Publish date:

2016-01-05

Standard Number:

IEC 62047-1:2016